✦ LIBER ✦

Modelisation of boron diffusion from ultra-low-energy implantation in crystalline silicon

✍ Scribed by L. Ihaddadene-Le Coq; J. Marcon; A. Dush-Nicolini; K. Masmoudi; K. Ketata

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Ultra low energy (100–2000 eV) boron imp

✍ A. Bousetta; J.A. Van den Berg; R. Valizadeh; D.G. Armour; P.C. Zalm 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 408 KB

Diffusion simulations of boron implanted

✍ L. Ihaddadene-Le Coq; J. Marcon; A. Dush-Nicolini; K. Masmoudi; K. Ketata 📂 Article 📅 2004 🏛 Elsevier Science 🌐 English ⚖ 282 KB

Atomic transport properties and electric

✍ V Privitera; E Napolitani; F Priolo; S Moffatt; A La Magna; G Mannino; A Carnera 📂 Article 📅 1999 🏛 Elsevier Science 🌐 English ⚖ 368 KB

Low energy boron implantation in silicon

✍ E.J.H Collart; K Weemers; N.E.B Cowern; J Politiek; P.H.L Bancken; J.G.M van Ber 📂 Article 📅 1998 🏛 Elsevier Science 🌐 English ⚖ 277 KB

Ultra-low energy ion implantation of bor

✍ Vittorio Privitera 📂 Article 📅 2002 🏛 Elsevier Science 🌐 English ⚖ 962 KB

Diffusion modelling of low-energy ion-im

✍ J. Marcon; A. Merabet 📂 Article 📅 2008 🏛 Elsevier Science 🌐 English ⚖ 423 KB