✦ LIBER ✦
Diffusion modelling of low-energy ion-implanted BF2 in crystalline silicon: Study of fluorine vacancy effect on boron diffusion
✍ Scribed by J. Marcon; A. Merabet
- Publisher
- Elsevier Science
- Year
- 2008
- Tongue
- English
- Weight
- 423 KB
- Volume
- 154-155
- Category
- Article
- ISSN
- 0921-5107
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