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Trap density of silicon chlorine oxides

✍ Scribed by D. Dimitrov; J. Kassabov; J. Halianov; T. Dimitrova


Publisher
Elsevier Science
Year
1991
Tongue
English
Weight
302 KB
Volume
22
Category
Article
ISSN
0026-2692

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In this paper we have studied the effect of accelerated thermal ageing on the electrical properties of amorphous silicon oxide films a-SiO 2 . In order to study the charge trapping phenomenon in this material, we have performed the mirror method using a secondary Electron Microscope (SEM). This meth