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Transmission electron microscopy investigation of the micro-defects in Czochralski silicon

✍ Scribed by Jin Xu; Weiqiang Wang; Deren Yang; H.J. Moeller

Book ID: 116604553
Publisher: Elsevier Science
Year: 2009
Tongue: English
Weight: 725 KB
Volume: 478
Category: Article
ISSN: 0925-8388
DOI: 10.1016/j.jallcom.2008.11.148

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