✦ LIBER ✦
Correlation Between Oxygen Precipitation and Extended Defects in Czochralski Silicon: Investigation by Means of Scanning Infrared Microscopy
✍ Scribed by Yuheng Zeng; Xiangyang Ma; Jiahe Chen; Deren Yang
- Book ID
- 107456885
- Publisher
- Springer US
- Year
- 2010
- Tongue
- English
- Weight
- 242 KB
- Volume
- 39
- Category
- Article
- ISSN
- 0361-5235
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