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Surface Defects in Polished Silicon Studied by Cross-Sectional Transmission Electron Microscopy

✍ Scribed by Stefan Johansson; Jan-Åke Schweitz; K. Peter; O. Lagerlöf


Book ID
110824505
Publisher
John Wiley and Sons
Year
1989
Tongue
English
Weight
930 KB
Volume
72
Category
Article
ISSN
0002-7820

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