Cross-sectional transmission electron microscopy study of obliquely evaporated silicon oxide thin films
✍ Scribed by O. Geszti; L. Gosztola; É. Seyfried
- Publisher
- Elsevier Science
- Year
- 1986
- Tongue
- English
- Weight
- 415 KB
- Volume
- 136
- Category
- Article
- ISSN
- 0040-6090
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## Abstract A method is described for the preparation of cross‐sectional samples of thin films for transmission electron microscopy. The technique produces larger amounts of thin region as compared with ion milling and eliminates the problems associated with ion beam damage. The requirement is that
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