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A novel technique for the preparation of thin films for cross-sectional transmission electron microscopy

✍ Scribed by Heuer, J. P. ;Howitt, D. G.

Publisher: Wiley (John Wiley & Sons)
Year: 1990
Tongue: English
Weight: 256 KB
Volume: 14
Category: Article
ISSN: 0741-0581
DOI: 10.1002/jemt.1060140112

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✦ Synopsis

Abstract

A method is described for the preparation of cross‐sectional samples of thin films for transmission electron microscopy. The technique produces larger amounts of thin region as compared with ion milling and eliminates the problems associated with ion beam damage. The requirement is that the films or multilayers must initially be deposited on a water‐soluble substrate such as single‐crystal NaCl.

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