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Sample preparation technique for cross-sectional transmission electron microscopy of quantum wire structures

✍ Scribed by Yu-Pei Chen; Jason D. Reed; Sean S. O'Keefe; William J. Schaff; Lester F. Eastman

Publisher
John Wiley and Sons
Year
1993
Tongue
English
Weight
363 KB
Volume
26
Category
Article
ISSN
1059-910X

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✦ Synopsis

A novel cross-sectional sample preparation technique for quantum wire (QWR) structures is described. By coating a thin layer of Au with a designed pattern on the sample as a marker to indicate the position of the wire pattern, the location of the thinned area can be controlled precisely. An example of applying this technique to an InGaAs/GaAs QWR structure is demonstrated. This technique can also be applied to any other small dimensional structures or devices with specific regions of interest. o 1993 Wiley-Liss, Inc.

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