✦ LIBER ✦

Improved sample preparation for cross-sectional transmission electron microscopy of layered structures using rocking-angle ion-milling techniques

✍ Scribed by Lee, Jeong Soo; Jeong, Young Woo; Kim, Sung Tae

Publisher: John Wiley and Sons
Year: 1996
Tongue: English
Weight: 735 KB
Volume: 33
Category: Article
ISSN: 1059-910X
DOI: 10.1002/(sici)1097-0029(19960415)33:6<490::aid-jemt3>3.0.co;2-p

No coin nor oath required. For personal study only.

✦ Synopsis

The rocking-angle ion-milling technique has been employed to produce optimum Pt/Ti/SiO,/Si, WITiN/Si021Si, and (Pb,La)TiO,/Pt/MgO samples for cross-sectional transmission electron microscopy (TEM). Because of the different ion-milling rates between film layers and substrate materials, no satisfactory cross-sectional TEM samples could be obtained when they were made by the conventional ion-milling method. The differential thinning problems could be effectively solved by optimizing both ion-milling rocking-angle and ion-beam incidence angle without the increase of overall milling time. It was found that the rocking-angle of around 40" is good when the multilayer structure is composed of materials with great ion-milling rate differences, while the rocking angle of around 80" is good when the ion-milling rate differences are relatively small.

📜 SIMILAR VOLUMES

Sample preparation technique for cross-s

Sample preparation technique for cross-sectional transmission electron microscopy of quantum wire structures

✍ Yu-Pei Chen; Jason D. Reed; Sean S. O'Keefe; William J. Schaff; Lester F. Eastma 📂 Article 📅 1993 🏛 John Wiley and Sons 🌐 English ⚖ 363 KB 👁 1 views

A novel cross-sectional sample preparation technique for quantum wire (QWR) structures is described. By coating a thin layer of Au with a designed pattern on the sample as a marker to indicate the position of the wire pattern, the location of the thinned area can be controlled precisely. An example

Technique for preparation and characteri

Technique for preparation and characterization in cross-section of oral titanium implant surfaces using focused ion beam and transmission electron microscopy

✍ Tobias Jarmar; Anders Palmquist; Rickard Brånemark; Leif Hermansson; Håkan Engqv 📂 Article 📅 2008 🏛 John Wiley and Sons 🌐 English ⚖ 445 KB 👁 1 views

## Abstract The surface properties of materials are believed to control most of the biological reactions toward implanted materials. To study the surface structure, elemental distribution, and morphology, using transmission electron microscopy (TEM) techniques, thin foils of the surface (in cross‐s