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A novel method for the cross-sectional TEM preparation of thin films deposited onto water-soluble substrates

✍ Scribed by György Sáfrán; Pierre Panine

Publisher
John Wiley and Sons
Year
1993
Tongue
English
Weight
499 KB
Volume
25
Category
Article
ISSN
1059-910X

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✦ Synopsis

A preparational method was developed solving the problem of cross-sectional TEM preparation of thin films and layer systems deposited onto water-soluble substrates. The technique is based on the replacement of the sample onto steady substrate, followed by mechanical and ion beam thinning. Cross-sectional TEM micrographs of Ag and AglAg,Se layers are shown presenting the efficiency of this novel technique.

📜 SIMILAR VOLUMES

A novel technique for the preparation of
A novel technique for the preparation of thin films for cross-sectional transmission electron microscopy
✍ Heuer, J. P. ;Howitt, D. G. 📂 Article 📅 1990 🏛 Wiley (John Wiley & Sons) 🌐 English ⚖ 256 KB 👁 1 views

## Abstract A method is described for the preparation of cross‐sectional samples of thin films for transmission electron microscopy. The technique produces larger amounts of thin region as compared with ion milling and eliminates the problems associated with ion beam damage. The requirement is that