Cross-sectional transmission electron microscopy of thin film polycrystalline semiconductors by conventional microtomy
β Scribed by Ana Albu-Yaron; Andre Frank; Gary Hodes; Rommel Noufi
- Publisher
- Elsevier Science
- Year
- 1993
- Tongue
- English
- Weight
- 924 KB
- Volume
- 227
- Category
- Article
- ISSN
- 0040-6090
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## Abstract A method is described for the preparation of crossβsectional samples of thin films for transmission electron microscopy. The technique produces larger amounts of thin region as compared with ion milling and eliminates the problems associated with ion beam damage. The requirement is that
## INTRODUCTION. The high temperature oxidation of alumina-and chromia-forming metals and alloys has been studied for many years. Although it is fairly easy to produce TEM cross-sections of the adherent scales formed on alloys containing reactive elements it has proved more difficult to cross-sect