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Transformation of electrically active defects as a result of annealing of silicon implanted with high-energy ions

✍ Scribed by I. V. Antonova; S. S. Shaĭmeev; S. A. Smagulova


Book ID
111443522
Publisher
Springer
Year
2006
Tongue
English
Weight
237 KB
Volume
40
Category
Article
ISSN
1063-7826

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