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TiO2 thin films studied by FTIR, AFM and spectroscopic ellipsometry

✍ Scribed by Bouachiba, Y.; Hanini, F.; Bouabellou, A.; Kermiche, F.; Taabouche, A.; Bouafia, M.; Amara, S.; Sahli, S.; Boukheddaden, K.

Book ID
120592528
Publisher
Inderscience Publishers
Year
2013
Tongue
English
Weight
257 KB
Volume
6
Category
Article
ISSN
1753-2507

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## Abstract Co‐doped TiO~2~ films were characterized by spectroscopic ellipsometry to determine their thickness, deposition rate and optical properties as function of substrate temperature and background gas composition. To fit the data we used a combination of a single Tauc–Lorentz oscillator with