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Spectroscopic ellipsometry study of Co-doped TiO2films

✍ Scribed by Águas, H. ;Popovici, N. ;Pereira, L. ;Conde, O. ;Branford, W. R. ;Cohen, L. F. ;Fortunato, E. ;Martins, R.

Publisher
John Wiley and Sons
Year
2008
Tongue
English
Weight
387 KB
Volume
205
Category
Article
ISSN
0031-8965

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✦ Synopsis

Abstract

Co‐doped TiO~2~ films were characterized by spectroscopic ellipsometry to determine their thickness, deposition rate and optical properties as function of substrate temperature and background gas composition. To fit the data we used a combination of a single Tauc–Lorentz oscillator with the Drude free electron model to take in account the free electrons present in the film. The Co doping and the addition of H~2~ to the gas phase during film growth cause the formation of a titanium oxide which containsfree electrons that absorb the energy of the red part of the spectrum, causing k to increase. The n of the films at 1.5 eV is about 2.3 eV. The fittings also show that the n of films decreases and k increases at the surface. This can be related to a segregation of Co to the surface, which in some cases, of high substrate temperature and high H~2~ flow during deposition, can lead to an even higher concentration of free electrons at the surface. (© 2008 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)

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