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Spectroscopic ellipsometry of thin film and bulk anatase (TiO2)

✍ Scribed by Jellison, G. E.; Boatner, L. A.; Budai, J. D.; Jeong, B.-S.; Norton, D. P.


Book ID
118132140
Publisher
American Institute of Physics
Year
2003
Tongue
English
Weight
460 KB
Volume
93
Category
Article
ISSN
0021-8979

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## Abstract Co‐doped TiO~2~ films were characterized by spectroscopic ellipsometry to determine their thickness, deposition rate and optical properties as function of substrate temperature and background gas composition. To fit the data we used a combination of a single Tauc–Lorentz oscillator with