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Time-resolved optical emission spectroscopy of pulsed DC magnetron sputtering plasmas

โœ Scribed by Lopez, J; Zhu, W; Freilich, A; Belkind, A; Becker, K

Book ID
119970011
Publisher
Institute of Physics
Year
2005
Tongue
English
Weight
254 KB
Volume
38
Category
Article
ISSN
0022-3727

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