Optical emission spectroscopy of DC pulsed plasmas used for steel nitriding

✍ Scribed by M.K. Sharma; B.K. Saikia; S. Bujarbarua

• Book ID: 104094422
• Publisher: Elsevier Science
• Year: 2008
• Tongue: English
• Weight: 545 KB
• Volume: 203
• Category: Article
• ISSN: 0257-8972
• DOI: 10.1016/j.surfcoat.2008.08.036

✦ Synopsis

Optical emission spectroscopy of atomic lines and molecular vibrational bands in N 2 , H 2 /N 2 and Ar/N 2 plasmas at steel nitriding conditions have been reported as an application of this diagnostic to plasma nitriding. An increase in Ar I intensity as Ar percentage increases in an Ar/N 2 mixture is observed, while the effect on N 2 + emission has a decrease, just the reverse of Ar I emission profile. As electron energy distribution function, EEDF, shifted to high electron energy as Ar percentage increases in the mixture, the presence of high-energy electron at high gas temperature of discharge can be predicted. It has also been found that pressure effect on N 2 + band in pure nitrogen plasma is to increase the band intensities. Spatial distribution of N 2 + (0,1) and N 2 + (0,2) emission profile in N 2 /H 2 mixture reveals shrinking of negative glow by 10 mm in the presence of 10% H 2 and 90% N 2 relative to a pure N 2 plasma.