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Control of chlorine inductively coupled plasma using optical-emission spectroscopy

✍ Scribed by R. B. Young; T. L. Scott; K. A. Prisbrey

Book ID: 107452732
Publisher: Springer US
Year: 2002
Tongue: English
Weight: 598 KB
Volume: 31
Category: Article
ISSN: 0361-5235
DOI: 10.1007/s11664-002-0033-7

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