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Optical emission from pulsed DC magnetron sputtering plasmas

✍ Scribed by Lopez, J.; WeiDong Zhu, ; Freilich, A.; Belkind, A.; Becker, K.

Book ID: 115470292
Publisher: IEEE
Year: 2005
Tongue: English
Weight: 148 KB
Volume: 33
Category: Article
ISSN: 0093-3813
DOI: 10.1109/tps.2005.845048

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