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Crystalline silicon films grown by pulsed dc magnetron sputtering

โœ Scribed by Peter Reinig; Frank Fenske; Walther Fuhs; Burkhardt Selle

Book ID
117145462
Publisher
Elsevier Science
Year
2002
Tongue
English
Weight
155 KB
Volume
299-302
Category
Article
ISSN
0022-3093

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Characteristics of Ti-doped ITO films gr
Characteristics of Ti-doped ITO films grown by DC magnetron sputtering
โœ Sung Mook Chung; Jae Heon Shin; Woo-Seok Cheong; Chi-Sun Hwang; Kyoung Ik Cho; Y ๐Ÿ“‚ Article ๐Ÿ“… 2012 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 612 KB

We have investigated the effects of Ti doping on the structural, optical, and electrical properties of indium tin oxide (ITO) thin films prepared by direct-current (DC) sputtering at room temperature. It is observed that the Ti doping changes the microstructure of the ITO films from amorphous to pol