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Epitaxial Aluminum Nitride Film on Silicon(111) Grown by Reactive DC Magnetron Sputter Deposition

✍ Scribed by Militello, Maria C.

Book ID: 111879984
Publisher: AVS (American Vacuum Society)
Year: 1992
Tongue: English
Weight: 242 KB
Volume: 1
Category: Article
ISSN: 1055-5269
DOI: 10.1116/1.1247668

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