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Growth of epitaxial AlN(0001) on Si(111) by reactive magnetron sputter deposition

✍ Scribed by Ivanov, I.; Hultman, L.; Järrendahl, K.; Mårtensson, P.; Sundgren, J.-E.; Hjörvarsson, B.; Greene, J. E.

Book ID
120827426
Publisher
American Institute of Physics
Year
1995
Tongue
English
Weight
1000 KB
Volume
78
Category
Article
ISSN
0021-8979

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Epitaxial growth of ZnO thin films on Al
Epitaxial growth of ZnO thin films on AlN substrates deposited at low temperature by magnetron sputtering
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## Abstract Hexagonal aluminium nitride (AlN) and zinc oxide (ZnO) thin films have been deposited by DC and RF reactive magnetron sputtering at room temperature. For a first set of samples, sputtered AlN films were deposited on silicon ZnO substrate. For a second set, ZnO films were deposited on Al