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Growth of epitaxial Cu on MgO(001) by magnetron sputter deposition

✍ Scribed by J.M. Purswani; T. Spila; D. Gall

Book ID
108289452
Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
195 KB
Volume
515
Category
Article
ISSN
0040-6090

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Epitaxial metastable Hf 1 -x Al x N alloys with 0 ≀x ≀ 0.50 were grown on MgO(001) substrates at 600 Β°C by ultrahigh vacuum reactive magnetron sputtering from Hf and Al targets in 90% Ar + 10% N 2 discharges at 7 mTorr. X-Ray diffraction and cross-sectional transmission electron microscopy show that