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Nanodomain and interface structure in epitaxial BaTiO3thin films on MgO deposited by magnetron sputtering

โœ Scribed by J. He; H. Q. Jiang; J. C. Jiang; E. I. Meletis


Publisher
Springer
Year
2011
Tongue
English
Weight
825 KB
Volume
47
Category
Article
ISSN
0022-2461

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## Abstract Hexagonal aluminium nitride (AlN) and zinc oxide (ZnO) thin films have been deposited by DC and RF reactive magnetron sputtering at room temperature. For a first set of samples, sputtered AlN films were deposited on silicon ZnO substrate. For a second set, ZnO films were deposited on Al