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Time-resolved optical emission spectroscopy during pulsed dc magnetron sputter deposition of Ti and TiO 2 thin films

✍ Scribed by Belkind, A; Zhu, W; Lopez, J; Becker, K

Book ID: 120388372
Publisher: Institute of Physics
Year: 2006
Tongue: English
Weight: 605 KB
Volume: 15
Category: Article
ISSN: 0963-0252
DOI: 10.1088/0963-0252/15/2/S03

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