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Characterization of pulsed dc magnetron sputtering plasmas

✍ Scribed by Belkind, A; Freilich, A; Lopez, J; Zhao, Z; Zhu, W; Becker, K

Book ID: 120221922
Publisher: Institute of Physics
Year: 2005
Tongue: English
Weight: 434 KB
Volume: 7
Category: Article
ISSN: 1367-2630
DOI: 10.1088/1367-2630/7/1/090

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