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Characterization of a DC magnetron sputtering device

✍ Scribed by Desideri, D.; Bagatin, M.; Spolaore, M.; Antoni, V.; Cavazzana, R.; Martines, E.; Serianni, G.; Zuin, M.

Book ID
120019315
Publisher
Emerald Group Publishing Limited
Year
2005
Tongue
English
Weight
300 KB
Volume
24
Category
Article
ISSN
0332-1649

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