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Time-resolved plasma characterisation of modulated pulsed power magnetron sputtering of chromium

โœ Scribed by B. Liebig; N. St J. Braithwaite; P.J. Kelly; R. Chistyakov; B. Abraham; J.W. Bradley


Book ID
113919375
Publisher
Elsevier Science
Year
2011
Tongue
English
Weight
448 KB
Volume
205
Category
Article
ISSN
0257-8972

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