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Three-dimensional rotor fabrication by focused-ion-beam chemical-vapor-deposition

✍ Scribed by Jun-ya Igaki; Reo Kometani; Ken-ichiro Nakamatsu; Kazuhiro Kanda; Yuichi Haruyama; Yukinori Ochiai; Jun-ichi Fujita; Takashi Kaito; Shinji Matsui

Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
421 KB
Volume
83
Category
Article
ISSN
0167-9317

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