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Three-dimensional GaN nano-structure fabrication by focused ion beam chemical vapor deposition

✍ Scribed by T. Nagata; P. Ahmet; Y. Yamauchi; Y. Sakuma; T. Sekiguchi; T. Chikyow

Publisher: Elsevier Science
Year: 2006
Tongue: English
Weight: 150 KB
Volume: 242
Category: Article
ISSN: 0168-583X
DOI: 10.1016/j.nimb.2005.08.130

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