Three-dimensional high-performance nano-tools fabricated using focused-ion-beam chemical-vapor-deposition

✍ Scribed by Reo Kometani; Takayuki Hoshino; Kazuhiro Kanda; Yuichi Haruyama; Takashi Kaito; Jun-ichi Fujita; Masahiko Ishida; Yukinori Ochiai; Shinji Matsui

• Publisher: Elsevier Science
• Year: 2005
• Tongue: English
• Weight: 263 KB
• Volume: 232
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/j.nimb.2005.03.074