✦ LIBER ✦

Rapid and three-dimensional nanoimprint template fabrication technology using focused ion beam lithography

✍ Scribed by Jun Taniguchi; Kentaro Koga; Yasuo Kogo; Iwao Miyamoto

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

GaAs/AlGaAs device fabrication using MBE

✍ G.A.C. Jones; P.D. Rose; E.H. Linfield; D.A. Ritchie 📂 Article 📅 1996 🏛 Elsevier Science 🌐 English ⚖ 246 KB

Three-dimensional high-performance nano-

✍ Reo Kometani; Takayuki Hoshino; Kazuhiro Kanda; Yuichi Haruyama; Takashi Kaito; 📂 Article 📅 2005 🏛 Elsevier Science 🌐 English ⚖ 263 KB