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Thickness determination of thin and ultra-thin SiO2 films by C-AFM IV-spectroscopy

✍ Scribed by Werner Frammelsberger; Guenther Benstetter; Janice Kiely; Richard Stamp


Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
591 KB
Volume
252
Category
Article
ISSN
0169-4332

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