A round robin characterisation of the thickness and composition of thin to ultra-thin AlNO films

✍ Scribed by N.P. Barradas; N. Added; W.M. Arnoldbik; I. Bogdanović-Radović; W. Bohne; S. Cardoso; C. Danner; N. Dytlewski; P.P. Freitas; M. Jakšić; C. Jeynes; C. Krug; W.N. Lennard; S. Lindner; Ch. Linsmeier; Z. Medunić; P. Pelicon; R.P. Pezzi; C. Radtke; J. Röhrich; T. Sajavaara; T.D.M. Salgado; F.C. Stedile; M.H. Tabacniks; I. Vickridge

• Publisher: Elsevier Science
• Year: 2005
• Tongue: English
• Weight: 595 KB
• Volume: 227
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/j.nimb.2004.08.021