High-resolution SIMS profiling of nitrogen in ultra-thin SiO2 films nitrided by RTP in NH3 and N2O

✍ Scribed by J. Mia; D. Bouvet; P. Letourneau; N. Xanthopoulos; H.J. Mathieu; M. Dutoit; C. Dubois; J.C. Dupuy

• Publisher: Elsevier Science
• Year: 1993
• Tongue: English
• Weight: 296 KB
• Volume: 22
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/0167-9317(93)90135-r