✦ LIBER ✦

Thin SiO2 films nitrided by rapid thermal processing in NH3 or N2O for applications in EEPROMs

✍ Scribed by M. Dutoit; D. Bouvet; J. Mi; N. Novkovski; P. Letourneau

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Electrical properties of thin SiO2 films

✍ M. Severi; G. Mattei; L. Dori; P. Maccagnani; G.L. Baldini; G. Pizzochero 📂 Article 📅 1992 🏛 Elsevier Science 🌐 English ⚖ 240 KB

High-resolution SIMS profiling of nitrog

✍ J. Mia; D. Bouvet; P. Letourneau; N. Xanthopoulos; H.J. Mathieu; M. Dutoit; C. D 📂 Article 📅 1993 🏛 Elsevier Science 🌐 English ⚖ 296 KB

Optical and electrical characterization

✍ N. Gonon; J. Ciavatti; C. Plossu; B. Balland; D. Barbier; A. Gagnaire 📂 Article 📅 1993 🏛 Elsevier Science 🌐 English ⚖ 469 KB