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The role of transient damage annealing in shallow junction formation

✍ Scribed by Richard B. Fair

Book ID: 113279674
Publisher: Elsevier Science
Year: 1989
Tongue: English
Weight: 798 KB
Volume: 37-38
Category: Article
ISSN: 0168-583X
DOI: 10.1016/0168-583x(89)90206-1

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