✦ LIBER ✦
Shallow junction formation in Si-devices: Damage accumulation and the role of photo-acoustic probes and multi-species implantation
✍ Scribed by Michael I. Current; N. Ohno; T. Hara
- Book ID
- 114168447
- Publisher
- Elsevier Science
- Year
- 1997
- Tongue
- English
- Weight
- 446 KB
- Volume
- 121
- Category
- Article
- ISSN
- 0168-583X
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