Use of ultra-low-energy BF2+ implantation and rapid annealing to avoid channeling effects in shallow junction formation

✍ Scribed by S.B. Felch; R.A. Powell

• Book ID: 113278785
• Publisher: Elsevier Science
• Year: 1987
• Tongue: English
• Weight: 176 KB
• Volume: 21
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/0168-583x(87)90885-8