𝔖 Bobbio Scriptorium
✦   LIBER   ✦

The influence of the photoacid-generator structure on chemical amplification in a resist

✍ Scribed by S. A. Bulgakova; M. M. Dzhons; L. M. Mazanova; A. Ya. Lopatin

Book ID
110197044
Publisher
SP MAIK Nauka/Interperiodica
Year
2006
Tongue
English
Weight
172 KB
Volume
48
Category
Article
ISSN
0965-545X

No coin nor oath required. For personal study only.

πŸ“œ SIMILAR VOLUMES

Effect of acid anion on the behavior of
Effect of acid anion on the behavior of single component molecular resists incorporating ionic photoacid generators
✍ Richard A. Lawson; Cheng-Tsung Lee; Laren M. Tolbert; Clifford L. Henderson πŸ“‚ Article πŸ“… 2009 πŸ› Elsevier Science 🌐 English βš– 250 KB

A series of single component chemically amplified molecular resists were made using an onium salt cation core of tris(4-(tert-butoxycarbonyloxy)-3,5-dimethylphenyl)sulfonium (TAS) with five different acid anions: chloride (Cl), hexafluoroantimonate (SbF 6 ), triflate (Tf), nonaflate (Nf), and tosyla