✦ LIBER ✦
Novel Positive-Tone Chemically Amplified Resists with Photoacid Generator in the Polymer Chains
✍ Scribed by H. Wu; K. E. Gonsalves
- Publisher
- John Wiley and Sons
- Year
- 2001
- Tongue
- English
- Weight
- 157 KB
- Volume
- 13
- Category
- Article
- ISSN
- 0935-9648
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