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Ion implantation change in the chemical structure of a resist

✍ Scribed by Shuzo Fujimura; Hiroshi Yano; Jun'ichi Konno

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Changes in the phase structure and forma

✍ I.H. Wilson; K.H. Goh; K.G. Stephens 📂 Article 📅 1976 🏛 Elsevier Science 🌐 English ⚖ 39 KB

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Influence of the chemical nature of impl

✍ Shcherbachev, K. D.; Voronova, M. I.; Bublik, V. T.; Mordkovich, V. N.; Pazhin, 📂 Article 📅 2013 🏛 SP MAIK Nauka/Interperiodica 🌐 English ⚖ 354 KB

Structural changes in a cobalt-based all

✍ S.A. Dillich; R.R. Biederman 📂 Article 📅 1987 🏛 Elsevier Science ⚖ 915 KB

The distribution profile of the chemical

✍ Y. Hama; K. Hamanaka; H. Matsumoto; T. Takano; H. Kudoh; M. Sugimoto; T. Seguchi 📂 Article 📅 1996 🏛 Elsevier Science 🌐 English ⚖ 399 KB

Formation of chemical compounds and stru

✍ C.P.O. Treutler; G. Dienel; K. Hohmuth 📂 Article 📅 1981 🏛 Elsevier Science 🌐 English ⚖ 255 KB