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Changes in the phase structure and formation of chemical compounds by ion implantation of tantalum thin films

✍ Scribed by I.H. Wilson; K.H. Goh; K.G. Stephens

Publisher: Elsevier Science
Year: 1976
Tongue: English
Weight: 39 KB
Volume: 36
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(76)90051-1

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