On-Wafer Spectrofluorometric Method for Determination of Relative Quantum Yields of Photoacid Generation in Chemically Amplified Resists

✍ Scribed by Feke, Gilbert D.; Grober, Robert D.; Pohlers, Gerd; Moore, Kathryn; Cameron, James F.

• Book ID: 127282180
• Publisher: American Chemical Society
• Year: 2001
• Tongue: English
• Weight: 169 KB
• Volume: 73
• Category: Article
• ISSN: 0003-2700
• DOI: 10.1021/ac0015319