Quantum Yields of Photoacid Generation in 193-nm Chemically Amplified Resists by Fluorescence Imaging Spectroscopy

✍ Scribed by Ray, Krishanu; Mason, Michael D.; Grober, Robert D.; Pohlers, Gerd; Staford, Carolyne; Cameron, James F.

• Book ID: 126227379
• Publisher: American Chemical Society
• Year: 2004
• Tongue: English
• Weight: 176 KB
• Volume: 16
• Category: Article
• ISSN: 0897-4756
• DOI: 10.1021/cm049448f