✦ LIBER ✦

Chemical amplification in the design of dry developing resist materials

✍ Scribed by Hiroshi Ito; C. Grant Willson

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

The influence of the photoacid-generator

✍ S. A. Bulgakova; M. M. Dzhons; L. M. Mazanova; A. Ya. Lopatin 📂 Article 📅 2006 🏛 SP MAIK Nauka/Interperiodica 🌐 English ⚖ 172 KB

Development of drying methods in the che

✍ A. K. Koryagin 📂 Article 📅 1967 🏛 Springer 🌐 English ⚖ 299 KB

Estimate of the material damage risk in

✍ B. G. Popov; V. A. Balin; A. I. Vasin 📂 Article 📅 1988 🏛 Springer 🌐 English ⚖ 556 KB

Photogenerated Base in Resist and Imagin

✍ Fréchet, Jean M. J.; Leung, Man-kit; Urankar, Edward J.; Willson, C. Grant; Came 📂 Article 📅 1997 🏛 American Chemical Society 🌐 English ⚖ 292 KB

The design of a freeze-drying system use

✍ James T. T. Pang 📂 Article 📅 1982 🏛 John Wiley and Sons 🌐 English ⚖ 841 KB

The design and development of CAL materi

✍ D.M. Laurillard 📂 Article 📅 1977 🏛 Elsevier Science 🌐 English ⚖ 538 KB