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Photogenerated Base in Resist and Imaging Materials: Design of Functional Polymers Susceptible to Base Catalyzed Decarboxylation

✍ Scribed by Fréchet, Jean M. J.; Leung, Man-kit; Urankar, Edward J.; Willson, C. Grant; Cameron, James F.; MacDonald, Scott A.; Niesert, Claus P.

Book ID: 126865416
Publisher: American Chemical Society
Year: 1997
Tongue: English
Weight: 292 KB
Volume: 9
Category: Article
ISSN: 0897-4756
DOI: 10.1021/cm970220k

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