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The influence of the film-substrate interface on the defect density and other properties of sputter-deposited amorphous hydrogenated silicon

โœ Scribed by Sopka, J.; Schneider, U.; Schroder, B.; Favre, M.; Finger, F.; Oechsner, H.


Book ID
114536208
Publisher
IEEE
Year
1989
Tongue
English
Weight
493 KB
Volume
36
Category
Article
ISSN
0018-9383

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