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Amorphous hydrogenated carbon films deposited by PECVD: influence of the substrate temperature on film growth and microstructure

✍ Scribed by G. Capote; R. Prioli; P.M. Jardim; A.R. Zanatta; L.G. Jacobsohn; F.L. Freire Jr.


Book ID
116667769
Publisher
Elsevier Science
Year
2004
Tongue
English
Weight
349 KB
Volume
338-340
Category
Article
ISSN
0022-3093

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